Turbo-molecular Pumps
Hybrids
Turbo-molecular Pumps
Compact and powerful turbo molecular pumps in the pumping speed range from 10 to 2050 l/s. The innovative rotor design enables high pumping speeds, high backing pump compatibility and high gas efficiency, as well as excellent compression for light gases.
Magnetic Levitation
Turbo-molecular Pumps
For this type of pump the position of the rotor is continuously monitored and adjusted. This allows low-vibration and wear-free operation with automatic balancing. The continuous stability of the rotor is ensured. These bearings are maintenance-free and do not require lubrication.
