Generators and Power Supplies
Plasma Generators
Industry leading Pinnacle DC power technology in a robust and compact 3000W DC generator package designed exclusively for low power applications where accuracy and process repeatability are critical…
A robust and coordinated power generation assembly designed specifically to enable advanced high-tech coatings…
RF, DC and Microwave Generators
Our integrated microwave plasma subsystems are complete ready-to-integrate microwave plasma solutions…
The SmartPower® AX2500 series of smart microwave power generators are rugged and reliable for demanding industrial and semiconductor manufacturing applications.
Microwave power supplies convert AC power into DC power, providing the voltage and current needed to power a magnetron or an entire microwave generator…
GHW generators offer field-proven reliability, exceptional stability and unsurpassed repeatability for high uptime and process performance. They are ideal for Plasma Enhanced Chemical Vapor Deposition (PECVD), high density plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays and data storage devices…
The RPDG-200 is a 20,000 W asymmetrical bipolar pulse DC system that allows the deposition of a wide variety of low-fault insulating films, including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO, and SiN…
Patented technology provides best-in-class amplitude/phase linearity and stability over a dynamic range of more than 70 dB, essentially no droop for burst and long pulse conditions, and immunity to load changes within a VSWR load range of 1.5: 1…
High Voltage Power Supply
Advanced Energy’s standard-size high-voltage power supplies offer multiple interfaces, mountings and improved efficiencies. Easily achieve maximum performance and high reliability for all your applications…
Advanced Energy’s small, high-voltage DC-to-DC converters offer a variety of features: arcing limits, tight line and load regulation, voltage monitoring and more. Get the right solution in the perfect size…