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Upright Microscope for large samples
Examine large samples – automated and clean room compatible
Analyze the smallest MEMS sensors down to an XXL wafer or even entire flat panel displays without destroying them. With a sample height of up to 254 mm and side clearance of up to 300 mm, you can examine the widest range of samples with the Axio Imager Vario. The column design offers great stability. Take control of your wafer in the clean room. A motorized z-drive, in addition to hardware autofocus, ensures automatic adjustment of the optimal focus position.
Clean Room
Semiconductor production and wafer inspection is done in clean rooms. Clean rooms are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified to this standard and meets the requirements of clean room class 5. ISO clean room class 5 is equivalent to class 100 of the previous FED STD 209E (1992). Use the clean room kit, which contains a 7x nozzle turret, particulate guard, and sneeze guard.

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