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Direct Write Systems VPG + Small Area Systems

The VPG + 200 and VPG + 400 are Heidelberg Instruments’ most advanced small and medium high-speed exposure systems. While their operating principle is based on the technology employed by the company’s large area VPG platforms, they also benefit from our extensive experience in small area lithography.
The VPG + 200 and VPG + 400 combine high resolution and outstanding image quality with high speed and consequently fast throughput. All this makes them ideal for rapid photomask production as well as a host of other direct writing applications, especially those using i-line resistors such as SU-8 or IP 3600. The systems can be used in a variety of demanding fields that require microstructures. Typical applications include MEMS, advanced packaging, 3D integration, LED production, life sciences and composite semiconductors.

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