High Temperature Probe Station

The CPS-HT models are MicroXact’s high-temperature systems for testing and characterizing devices at the highest temperatures on the market, either in a vacuum or in a controlled gas environment. We offer manual wafer testers for samples up to 2″ x 2″ (50 mm x 50 mm) and motorized or semi-automatic systems for testing wafers of 100 mm or more. These systems are capable of operating at up to 700°C under vacuum or 650°C at atmospheric pressure.