Integrated Microwave Plasma Subsystems

The high-powered microwave plasma system features the high-powered microwave plasma source, a generator (with isolator) and a self-adjusting system consisting of the precision power detector and the SmartMatch® unit. This integral system offers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.

• 2.45 GHz high power microwave plasma system
  
• Advanced closed-loop power control with <1% output accuracy variation
  
• Instantaneous plasma ignition
  
• Automatic tuning system in less than 1.5 seconds