On-board Cryopumps

They provide superior uptime and consistent performance, while also enhancing the overall productivity of the process.

Main features

• Fast Regen capacity ™ which extends cryopump performance between regenerations.
• Simultaneous regeneration capability, enabled by networking your cryopumps, accelerating overall system regeneration.
• A built-in microprocessor control to improve performance, perform diagnostic routines and provide communication capability.
• Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.