On-board IS Cryopumps

Integrated IS Cryopumps provide the highest uptime, best productivity and lowest total cost of ownership of any cryopump system available today.

Key Features:

• Maintains optimum vacuum performance throughout the system, providing exceptional process consistency.
• Faster regenerations in single and multiple pump configurations.
• Low energy and cooling water consumption without compromising vacuum performance.
• Easy system integration.
• Rapid production facility.
• Improved remote monitoring for preventive and predictive maintenance.