Semi-automated Systems

The SPS 2600, SPS 2800 and SPS 12000 series are semi-automated probe stations from MicroXact, designed for device characterization and semi-automated probing of wafers up to 200 mm. These systems are built on a versatile, heavy-duty platform that can be configured to handle a wide range of applications. With a variety of options available, including wafer heating/cooling bases, standard or digital microscopes and programmable step indexing, the MicroXact stations offer a cost-effective, easy-to-use solution for all your high-productivity characterization devices and test reliability.