Semi-Automated Vacuum Probe Systems

The SPS-2600-VAC and SPS-2800-VAC series are MicroXact vacuum probe systems designed to support motorized or semi-automatic drilling up to 100 mm or up to 200 mm in a vacuum or controlled gas atmosphere. This vacuum test solution is systematic and accurate, cost effective, quiet and convenient to use. These vacuum probe systems are built on a versatile, vibration-compensated platform that can be configured to handle a wide range of drilling applications. Ideal for ice-free testing up to 77K or for high temperature testing of devices and components that are prone to oxidation, MicroXact vacuum probe systems offer wafer level probing in controlled environments.